VEECO INSTRUMENTS INC, DEF 14A filed on 3/19/2026
Proxy Statement (definitive)
v3.26.1
Cover
 12 Months Ended
Dec. 31, 2025
Document Information [Line Items]  
Document Type DEF 14A
Amendment Flag false
Entity Information [Line Items]  
Entity Registrant Name Veeco Instruments Inc.
Entity Central Index Key 0000103145
v3.26.1
Pay vs Performance Disclosure
$ / shares in Units, pure in Thousands
 12 Months Ended
Dec. 31, 2025
USD ($)
$ / shares
Dec. 31, 2024
USD ($)
$ / shares
Dec. 31, 2023
USD ($)
$ / shares
Dec. 31, 2022
USD ($)
$ / shares
Dec. 31, 2021
USD ($)
$ / shares
Mar. 14, 2025
$ / shares
Mar. 14, 2024
$ / shares
Mar. 13, 2023
$ / shares
Mar. 17, 2022
$ / shares
Mar. 12, 2021
$ / shares
Dec. 31, 2020
$ / shares
Mar. 17, 2020
$ / shares
Dec. 31, 2019
$ / shares
Mar. 14, 2019
$ / shares
Oct. 01, 2018
$ / shares
Pay vs Performance Disclosure                              
Pay vs Performance Disclosure, Table
Pay Versus Performance
As required by Item 402(v) of Regulation S-K, we are providing the following information regarding the relationship between executive compensation and our financial performance for each of the last five completed calendar years. In determining the “compensation actually paid” to our NEOs, we are required to make various adjustments to amounts that have been reported in the Summary Compensation Table in previous years since the required valuation methods for this section differ from those required in the Summary Compensation Table. The table below summarizes compensation values both previously reported in our Summary Compensation Tables and the adjusted values required in this section for calendar years 2021, 2022, 2023, 2024, and 2025.
​ ​
Year
​ ​ ​
Summary
Compensation
Table (SCT)
Total for PEO
($)(1)
​ ​ ​
Compensation
Actually Paid to
PEO ($)(1)(3)
​ ​ ​
Average SCT
Total for Non-
PEO NEOs
($)(2)
​ ​ ​
Average
Compensation
Actually Paid to
Non-PEO NEOs
($)(2)(3)
​ ​ ​
Value of Initial Fixed
$100 Investment
based on:
​ ​ ​
Net
Income
(Loss)
($ thousands)
​ ​ ​
Adjusted
Operating
Income
($ thousands)
​ ​
​
Company
TSR(4)
​ ​ ​
Peer
Group
TSR(4)
​ ​
​ ​ 2025 ​ ​ ​ ​ ​ 4,624,824 ​ ​ ​ ​ ​ ​ 5,667,526 ​ ​ ​ ​ ​ ​ 1,235,311 ​ ​ ​ ​ ​ ​ 1,404,040 ​ ​ ​ ​ ​ ​ 164.63 ​ ​ ​ ​ ​ ​ 29.4 ​ ​ ​ ​ ​ ​ 35,390 ​ ​ ​ ​ ​ ​ 84,267 ​ ​ ​
​ ​ 2024 ​ ​ ​ ​ ​ 6,866,618 ​ ​ ​ ​ ​ ​ 2,783,724 ​ ​ ​ ​ ​ ​ 2,089,727 ​ ​ ​ ​ ​ ​ 1,116,006 ​ ​ ​ ​ ​ ​ 182.5 ​ ​ ​ ​ ​ ​ 40.63 ​ ​ ​ ​ ​ ​ 73,714 ​ ​ ​ ​ ​ ​ 129,405 ​ ​ ​
​ ​ 2023 ​ ​ ​ ​ ​ 4,611,004 ​ ​ ​ ​ ​ ​ 13,124,880 ​ ​ ​ ​ ​ ​ 1,295,109 ​ ​ ​ ​ ​ ​ 3,300,891 ​ ​ ​ ​ ​ ​ 211.30 ​ ​ ​ ​ ​ ​ 38.89 ​ ​ ​ ​ ​ ​ (30,368) ​ ​ ​ ​ ​ ​ 122,410 ​ ​ ​
​ ​ 2022 ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 126.48 ​ ​ ​ ​ ​ ​ 36.09 ​ ​ ​ ​ ​ ​ 166,942 ​ ​ ​ ​ ​ ​ 116,577 ​ ​ ​
​ ​ 2021 ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​ ​ ​ ​ 193.81 ​ ​ ​ ​ ​ ​ 81.82 ​ ​ ​ ​ ​ ​ 26,038 ​ ​ ​ ​ ​ ​ 104,367 ​ ​ ​
​
(1)
The PEO (principal executive officer) for each year presented was identified as Dr. Miller, the Company’s CEO.
​
(2)
The Non-PEO NEOs for each year presented were identified as Mr. Kiernan, Drs. Devasahayam and Porshnev, and Ms. Wilkerson.
​
(3)
A reconciliation of Total Compensation per the Summary Compensation Table to Compensation Actually Paid is as follows:
​
​ ​ ​ ​ ​ ​
2025
​ ​ ​
2024
​ ​ ​
2023
​ ​ ​
2022
​ ​ ​
2021
​ ​
​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​
​ ​
Total Compensation from SCT
​ ​ ​ ​ ​ 4,624,824 ​ ​ ​ ​ ​ ​ 1,235,311 ​ ​ ​ ​ ​ ​ 6,866,618 ​ ​ ​ ​ ​ ​ 2,089,727 ​ ​ ​ ​ ​ ​ 4,611,004 ​ ​ ​ ​ ​ ​ 1,295,109 ​ ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​
​ ​
Deduct: Amounts
Reported Under
“Stock Awards”
and “Option
Awards”
columns in SCT
​ ​ ​ ​ ​ (3,931,130) ​ ​ ​ ​ ​ ​ (786,226) ​ ​ ​ ​ ​ ​ (5,742,360) ​ ​ ​ ​ ​ ​ (1,482,345) ​ ​ ​ ​ ​ ​ (3,531,188) ​ ​ ​ ​ ​ ​ (699,175) ​ ​ ​ ​ ​ ​ (4,741,020) ​ ​ ​ ​ ​ ​ (1,135,870) ​ ​ ​ ​ ​ ​ (3,122,580) ​ ​ ​ ​ ​ ​ (813,172) ​ ​ ​
​ ​
Add: Year-end
value of equity
awards granted
in covered year
that were
outstanding and
unvested as of
the end of the
covered fiscal
year(a)(b)
​ ​ ​ ​ ​ 5,670,140 ​ ​ ​ ​ ​ ​ 1,134,028 ​ ​ ​ ​ ​ ​ 3,602,300 ​ ​ ​ ​ ​ ​ 910,863 ​ ​ ​ ​ ​ ​ 5,828,750 ​ ​ ​ ​ ​ ​ 1,154,093 ​ ​ ​ ​ ​ ​ 2,517,420 ​ ​ ​ ​ ​ ​ 603,132 ​ ​ ​ ​ ​ ​ 4,362,540 ​ ​ ​ ​ ​ ​ 1,136,078 ​ ​ ​
​ ​
Add: The amount
of change in fair
values as of
year-end (from
end of the prior
year) of awards
granted in
prior years and
outstanding at
year-end(a)(b)
​ ​ ​ ​ ​ 382,399 ​ ​ ​ ​ ​ ​ 72,718 ​ ​ ​ ​ ​ ​ (2,644,666) ​ ​ ​ ​ ​ ​ (587,540) ​ ​ ​ ​ ​ ​ 5,341,740 ​ ​ ​ ​ ​ ​ 1,348,802 ​ ​ ​ ​ ​ ​ (2,779,460) ​ ​ ​ ​ ​ ​ (737,886) ​ ​ ​ ​ ​ ​ 4,456,145 ​ ​ ​ ​ ​ ​ 828,795 ​ ​ ​
​ ​
Add: The amount
of change in fair
values as of the
vesting date
(from end of the
prior year) of
awards granted
in any prior
fiscal year for
which vesting
conditions were
satisfied during
the covered
fiscal year(a)(b)
​ ​ ​ ​ ​ (1,078,707) ​ ​ ​ ​ ​ ​ (251,791) ​ ​ ​ ​ ​ ​ 701,833 ​ ​ ​ ​ ​ ​ 185,301 ​ ​ ​ ​ ​ ​ 874,573 ​ ​ ​ ​ ​ ​ 202,063 ​ ​ ​ ​ ​ ​ (17,073) ​ ​ ​ ​ ​ ​ (89,499) ​ ​ ​ ​ ​ ​ 2,879,634 ​ ​ ​ ​ ​ ​ 89,435 ​ ​ ​
​ ​
Compensation Actually Paid
​ ​ ​ ​ ​ 5,667,526 ​ ​ ​ ​ ​ ​ 1,404,040 ​ ​ ​ ​ ​ ​ 2,783,724 ​ ​ ​ ​ ​ ​ 1,116,006 ​ ​ ​ ​ ​ ​ 13,124,880 ​ ​ ​ ​ ​ ​ 3,300,891 ​ ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​
​
(a)
Each NEO received time-based restricted stock awards in each of the periods presented. The fair value of time-based restricted stock awards is dependent on the Company’s stock price. The Company’s closing stock price as of the dates listed are as follows:​
​
​ ​
Date
​ ​ ​
Stock Price
​ ​
​ ​ 12/31/2021 ​ ​ ​ ​ $ 28.47 ​ ​ ​
​ ​ 12/31/2022 ​ ​ ​ ​ $ 18.58 ​ ​ ​
​ ​ 12/31/2023 ​ ​ ​ ​ $ 31.03 ​ ​ ​
​ ​ 12/31/2024 ​ ​ ​ ​ $ 26.80 ​ ​ ​
​ ​ 12/31/2025 ​ ​ ​ ​ $ 28.58 ​ ​ ​
​
(b)
Our NEOs received PRSUs during each of the periods presented, that are subject to the achievement of designated performance criteria, based on three-year total shareholder return. These PRSUs are valued based upon the Monte Carlo simulation method. Please see below for the per share fair value as of each respective date:​
​
​ ​
Award
​ ​ ​
Grant
Date
​ ​ ​
Per Share Fair Value at
​ ​
​
Grant
Date
​ ​ ​
12/31/2019
​ ​ ​
12/31/2020
​ ​ ​
12/31/2021
​ ​ ​
12/31/2022
​ ​ ​
12/31/2023
​ ​ ​
12/31/2024
​ ​ ​
12/31/2025
​ ​
​ ​ 2018 PRSU(c) ​ ​ ​ ​ ​ 10/1/2018 ​ ​ ​ ​ ​ $ 15.58 ​ ​ ​ ​ ​ $ 25.01 ​ ​ ​ ​ ​ $ 31.99 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2019 PRSU(d) ​ ​ ​ ​ ​ 3/14/2019 ​ ​ ​ ​ ​ $ 14.46 ​ ​ ​ ​ ​ $ 20.36 ​ ​ ​ ​ ​ $ 24.81 ​ ​ ​ ​ ​ $ 56.29 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2020 PRSU(d) ​ ​ ​ ​ ​ 3/17/2020 ​ ​ ​ ​ ​ $ 10.59 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 18.92 ​ ​ ​ ​ ​ $ 43.47 ​ ​ ​ ​ ​ $ 29.82 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2021 PRSU(e) ​ ​ ​ ​ ​ 3/12/2021 ​ ​ ​ ​ ​ $ 27.81 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 40.60 ​ ​ ​ ​ ​ $ 24.76 ​ ​ ​ ​ ​ $ 60.39 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2022 PRSU(e) ​ ​ ​ ​ ​ 3/17/2022 ​ ​ ​ ​ ​ $ 45.28 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 22.27 ​ ​ ​ ​ ​ $ 48.42 ​ ​ ​ ​ ​ $ 29.48 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2023 PRSU(e) ​ ​ ​ ​ ​ 3/13/2023 ​ ​ ​ ​ ​ $ 32.25 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 55.03 ​ ​ ​ ​ ​ $ 42.91 ​ ​ ​ ​ ​ $ 47.09 ​ ​ ​
​ ​ 2024 PRSU(e) ​ ​ ​ ​ ​ 3/14/2024 ​ ​ ​ ​ ​ $ 49.38 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 28.20 ​ ​ ​ ​ ​ $ 27.76 ​ ​ ​
​ ​ 2025 PRSU(e) ​ ​ ​ ​ ​ 3/14/2025 ​ ​ ​ ​ ​ $ 31.73 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 46.92 ​ ​ ​
​
(c)
Granted to Dr. Miller only.
​
(d)
Granted to Drs. Miller, Devasahayam, and Porshnev, and Mr. Kiernan.
​
(e)
Granted to Drs. Miller, Devasahayam, and Porshnev, Mr. Kiernan, and Ms. Wilkerson.
​
(4)
The values disclosed in this TSR column represent the measurement period value of an investment of $100 in respective stock or index as of December 31, 2019, and then valued again on each of December 31, 2020, 2021, 2022, 2023, 2024, and 2025.
                           
Company Selected Measure Name Adjusted Operating Income                            
Named Executive Officers, Footnote
(1)
The PEO (principal executive officer) for each year presented was identified as Dr. Miller, the Company’s CEO.
​
(2)
The Non-PEO NEOs for each year presented were identified as Mr. Kiernan, Drs. Devasahayam and Porshnev, and Ms. Wilkerson.
                           
Peer Group Issuers, Footnote
(4)
The values disclosed in this TSR column represent the measurement period value of an investment of $100 in respective stock or index as of December 31, 2019, and then valued again on each of December 31, 2020, 2021, 2022, 2023, 2024, and 2025.
                           
PEO Total Compensation Amount | $ $ 4,624,824 $ 6,866,618 $ 4,611,004 $ 5,914,884 $ 4,526,501                    
PEO Actually Paid Compensation Amount | $ $ 5,667,526 2,783,724 13,124,880 894,752 13,102,240                    
Adjustment To PEO Compensation, Footnote
(3)
A reconciliation of Total Compensation per the Summary Compensation Table to Compensation Actually Paid is as follows:
​
​ ​ ​ ​ ​ ​
2025
​ ​ ​
2024
​ ​ ​
2023
​ ​ ​
2022
​ ​ ​
2021
​ ​
​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​
​ ​
Total Compensation from SCT
​ ​ ​ ​ ​ 4,624,824 ​ ​ ​ ​ ​ ​ 1,235,311 ​ ​ ​ ​ ​ ​ 6,866,618 ​ ​ ​ ​ ​ ​ 2,089,727 ​ ​ ​ ​ ​ ​ 4,611,004 ​ ​ ​ ​ ​ ​ 1,295,109 ​ ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​
​ ​
Deduct: Amounts
Reported Under
“Stock Awards”
and “Option
Awards”
columns in SCT
​ ​ ​ ​ ​ (3,931,130) ​ ​ ​ ​ ​ ​ (786,226) ​ ​ ​ ​ ​ ​ (5,742,360) ​ ​ ​ ​ ​ ​ (1,482,345) ​ ​ ​ ​ ​ ​ (3,531,188) ​ ​ ​ ​ ​ ​ (699,175) ​ ​ ​ ​ ​ ​ (4,741,020) ​ ​ ​ ​ ​ ​ (1,135,870) ​ ​ ​ ​ ​ ​ (3,122,580) ​ ​ ​ ​ ​ ​ (813,172) ​ ​ ​
​ ​
Add: Year-end
value of equity
awards granted
in covered year
that were
outstanding and
unvested as of
the end of the
covered fiscal
year(a)(b)
​ ​ ​ ​ ​ 5,670,140 ​ ​ ​ ​ ​ ​ 1,134,028 ​ ​ ​ ​ ​ ​ 3,602,300 ​ ​ ​ ​ ​ ​ 910,863 ​ ​ ​ ​ ​ ​ 5,828,750 ​ ​ ​ ​ ​ ​ 1,154,093 ​ ​ ​ ​ ​ ​ 2,517,420 ​ ​ ​ ​ ​ ​ 603,132 ​ ​ ​ ​ ​ ​ 4,362,540 ​ ​ ​ ​ ​ ​ 1,136,078 ​ ​ ​
​ ​
Add: The amount
of change in fair
values as of
year-end (from
end of the prior
year) of awards
granted in
prior years and
outstanding at
year-end(a)(b)
​ ​ ​ ​ ​ 382,399 ​ ​ ​ ​ ​ ​ 72,718 ​ ​ ​ ​ ​ ​ (2,644,666) ​ ​ ​ ​ ​ ​ (587,540) ​ ​ ​ ​ ​ ​ 5,341,740 ​ ​ ​ ​ ​ ​ 1,348,802 ​ ​ ​ ​ ​ ​ (2,779,460) ​ ​ ​ ​ ​ ​ (737,886) ​ ​ ​ ​ ​ ​ 4,456,145 ​ ​ ​ ​ ​ ​ 828,795 ​ ​ ​
​ ​
Add: The amount
of change in fair
values as of the
vesting date
(from end of the
prior year) of
awards granted
in any prior
fiscal year for
which vesting
conditions were
satisfied during
the covered
fiscal year(a)(b)
​ ​ ​ ​ ​ (1,078,707) ​ ​ ​ ​ ​ ​ (251,791) ​ ​ ​ ​ ​ ​ 701,833 ​ ​ ​ ​ ​ ​ 185,301 ​ ​ ​ ​ ​ ​ 874,573 ​ ​ ​ ​ ​ ​ 202,063 ​ ​ ​ ​ ​ ​ (17,073) ​ ​ ​ ​ ​ ​ (89,499) ​ ​ ​ ​ ​ ​ 2,879,634 ​ ​ ​ ​ ​ ​ 89,435 ​ ​ ​
​ ​
Compensation Actually Paid
​ ​ ​ ​ ​ 5,667,526 ​ ​ ​ ​ ​ ​ 1,404,040 ​ ​ ​ ​ ​ ​ 2,783,724 ​ ​ ​ ​ ​ ​ 1,116,006 ​ ​ ​ ​ ​ ​ 13,124,880 ​ ​ ​ ​ ​ ​ 3,300,891 ​ ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​
(a)
Each NEO received time-based restricted stock awards in each of the periods presented. The fair value of time-based restricted stock awards is dependent on the Company’s stock price. The Company’s closing stock price as of the dates listed are as follows:​
​
​ ​
Date
​ ​ ​
Stock Price
​ ​
​ ​ 12/31/2021 ​ ​ ​ ​ $ 28.47 ​ ​ ​
​ ​ 12/31/2022 ​ ​ ​ ​ $ 18.58 ​ ​ ​
​ ​ 12/31/2023 ​ ​ ​ ​ $ 31.03 ​ ​ ​
​ ​ 12/31/2024 ​ ​ ​ ​ $ 26.80 ​ ​ ​
​ ​ 12/31/2025 ​ ​ ​ ​ $ 28.58 ​ ​ ​
(b)
Our NEOs received PRSUs during each of the periods presented, that are subject to the achievement of designated performance criteria, based on three-year total shareholder return. These PRSUs are valued based upon the Monte Carlo simulation method. Please see below for the per share fair value as of each respective date:​
​
​ ​
Award
​ ​ ​
Grant
Date
​ ​ ​
Per Share Fair Value at
​ ​
​
Grant
Date
​ ​ ​
12/31/2019
​ ​ ​
12/31/2020
​ ​ ​
12/31/2021
​ ​ ​
12/31/2022
​ ​ ​
12/31/2023
​ ​ ​
12/31/2024
​ ​ ​
12/31/2025
​ ​
​ ​ 2018 PRSU(c) ​ ​ ​ ​ ​ 10/1/2018 ​ ​ ​ ​ ​ $ 15.58 ​ ​ ​ ​ ​ $ 25.01 ​ ​ ​ ​ ​ $ 31.99 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2019 PRSU(d) ​ ​ ​ ​ ​ 3/14/2019 ​ ​ ​ ​ ​ $ 14.46 ​ ​ ​ ​ ​ $ 20.36 ​ ​ ​ ​ ​ $ 24.81 ​ ​ ​ ​ ​ $ 56.29 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2020 PRSU(d) ​ ​ ​ ​ ​ 3/17/2020 ​ ​ ​ ​ ​ $ 10.59 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 18.92 ​ ​ ​ ​ ​ $ 43.47 ​ ​ ​ ​ ​ $ 29.82 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2021 PRSU(e) ​ ​ ​ ​ ​ 3/12/2021 ​ ​ ​ ​ ​ $ 27.81 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 40.60 ​ ​ ​ ​ ​ $ 24.76 ​ ​ ​ ​ ​ $ 60.39 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2022 PRSU(e) ​ ​ ​ ​ ​ 3/17/2022 ​ ​ ​ ​ ​ $ 45.28 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 22.27 ​ ​ ​ ​ ​ $ 48.42 ​ ​ ​ ​ ​ $ 29.48 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2023 PRSU(e) ​ ​ ​ ​ ​ 3/13/2023 ​ ​ ​ ​ ​ $ 32.25 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 55.03 ​ ​ ​ ​ ​ $ 42.91 ​ ​ ​ ​ ​ $ 47.09 ​ ​ ​
​ ​ 2024 PRSU(e) ​ ​ ​ ​ ​ 3/14/2024 ​ ​ ​ ​ ​ $ 49.38 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 28.20 ​ ​ ​ ​ ​ $ 27.76 ​ ​ ​
​ ​ 2025 PRSU(e) ​ ​ ​ ​ ​ 3/14/2025 ​ ​ ​ ​ ​ $ 31.73 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 46.92 ​ ​ ​
​
(c)
Granted to Dr. Miller only.
​
(d)
Granted to Drs. Miller, Devasahayam, and Porshnev, and Mr. Kiernan.
​
(e)
Granted to Drs. Miller, Devasahayam, and Porshnev, Mr. Kiernan, and Ms. Wilkerson.
                           
Non-PEO NEO Average Total Compensation Amount | $ $ 1,235,311 2,089,727 1,295,109 1,769,683 1,514,852                    
Non-PEO NEO Average Compensation Actually Paid Amount | $ $ 1,404,040 1,116,006 3,300,891 409,560 2,755,988                    
Adjustment to Non-PEO NEO Compensation Footnote
(3)
A reconciliation of Total Compensation per the Summary Compensation Table to Compensation Actually Paid is as follows:
​
​ ​ ​ ​ ​ ​
2025
​ ​ ​
2024
​ ​ ​
2023
​ ​ ​
2022
​ ​ ​
2021
​ ​
​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​ ​
PEO ($)
​ ​ ​
Average
for Non-
PEO
NEOs ($)
​ ​
​ ​
Total Compensation from SCT
​ ​ ​ ​ ​ 4,624,824 ​ ​ ​ ​ ​ ​ 1,235,311 ​ ​ ​ ​ ​ ​ 6,866,618 ​ ​ ​ ​ ​ ​ 2,089,727 ​ ​ ​ ​ ​ ​ 4,611,004 ​ ​ ​ ​ ​ ​ 1,295,109 ​ ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​
​ ​
Deduct: Amounts
Reported Under
“Stock Awards”
and “Option
Awards”
columns in SCT
​ ​ ​ ​ ​ (3,931,130) ​ ​ ​ ​ ​ ​ (786,226) ​ ​ ​ ​ ​ ​ (5,742,360) ​ ​ ​ ​ ​ ​ (1,482,345) ​ ​ ​ ​ ​ ​ (3,531,188) ​ ​ ​ ​ ​ ​ (699,175) ​ ​ ​ ​ ​ ​ (4,741,020) ​ ​ ​ ​ ​ ​ (1,135,870) ​ ​ ​ ​ ​ ​ (3,122,580) ​ ​ ​ ​ ​ ​ (813,172) ​ ​ ​
​ ​
Add: Year-end
value of equity
awards granted
in covered year
that were
outstanding and
unvested as of
the end of the
covered fiscal
year(a)(b)
​ ​ ​ ​ ​ 5,670,140 ​ ​ ​ ​ ​ ​ 1,134,028 ​ ​ ​ ​ ​ ​ 3,602,300 ​ ​ ​ ​ ​ ​ 910,863 ​ ​ ​ ​ ​ ​ 5,828,750 ​ ​ ​ ​ ​ ​ 1,154,093 ​ ​ ​ ​ ​ ​ 2,517,420 ​ ​ ​ ​ ​ ​ 603,132 ​ ​ ​ ​ ​ ​ 4,362,540 ​ ​ ​ ​ ​ ​ 1,136,078 ​ ​ ​
​ ​
Add: The amount
of change in fair
values as of
year-end (from
end of the prior
year) of awards
granted in
prior years and
outstanding at
year-end(a)(b)
​ ​ ​ ​ ​ 382,399 ​ ​ ​ ​ ​ ​ 72,718 ​ ​ ​ ​ ​ ​ (2,644,666) ​ ​ ​ ​ ​ ​ (587,540) ​ ​ ​ ​ ​ ​ 5,341,740 ​ ​ ​ ​ ​ ​ 1,348,802 ​ ​ ​ ​ ​ ​ (2,779,460) ​ ​ ​ ​ ​ ​ (737,886) ​ ​ ​ ​ ​ ​ 4,456,145 ​ ​ ​ ​ ​ ​ 828,795 ​ ​ ​
​ ​
Add: The amount
of change in fair
values as of the
vesting date
(from end of the
prior year) of
awards granted
in any prior
fiscal year for
which vesting
conditions were
satisfied during
the covered
fiscal year(a)(b)
​ ​ ​ ​ ​ (1,078,707) ​ ​ ​ ​ ​ ​ (251,791) ​ ​ ​ ​ ​ ​ 701,833 ​ ​ ​ ​ ​ ​ 185,301 ​ ​ ​ ​ ​ ​ 874,573 ​ ​ ​ ​ ​ ​ 202,063 ​ ​ ​ ​ ​ ​ (17,073) ​ ​ ​ ​ ​ ​ (89,499) ​ ​ ​ ​ ​ ​ 2,879,634 ​ ​ ​ ​ ​ ​ 89,435 ​ ​ ​
​ ​
Compensation Actually Paid
​ ​ ​ ​ ​ 5,667,526 ​ ​ ​ ​ ​ ​ 1,404,040 ​ ​ ​ ​ ​ ​ 2,783,724 ​ ​ ​ ​ ​ ​ 1,116,006 ​ ​ ​ ​ ​ ​ 13,124,880 ​ ​ ​ ​ ​ ​ 3,300,891 ​ ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​
(a)
Each NEO received time-based restricted stock awards in each of the periods presented. The fair value of time-based restricted stock awards is dependent on the Company’s stock price. The Company’s closing stock price as of the dates listed are as follows:​
​
​ ​
Date
​ ​ ​
Stock Price
​ ​
​ ​ 12/31/2021 ​ ​ ​ ​ $ 28.47 ​ ​ ​
​ ​ 12/31/2022 ​ ​ ​ ​ $ 18.58 ​ ​ ​
​ ​ 12/31/2023 ​ ​ ​ ​ $ 31.03 ​ ​ ​
​ ​ 12/31/2024 ​ ​ ​ ​ $ 26.80 ​ ​ ​
​ ​ 12/31/2025 ​ ​ ​ ​ $ 28.58 ​ ​ ​
(b)
Our NEOs received PRSUs during each of the periods presented, that are subject to the achievement of designated performance criteria, based on three-year total shareholder return. These PRSUs are valued based upon the Monte Carlo simulation method. Please see below for the per share fair value as of each respective date:​
​
​ ​
Award
​ ​ ​
Grant
Date
​ ​ ​
Per Share Fair Value at
​ ​
​
Grant
Date
​ ​ ​
12/31/2019
​ ​ ​
12/31/2020
​ ​ ​
12/31/2021
​ ​ ​
12/31/2022
​ ​ ​
12/31/2023
​ ​ ​
12/31/2024
​ ​ ​
12/31/2025
​ ​
​ ​ 2018 PRSU(c) ​ ​ ​ ​ ​ 10/1/2018 ​ ​ ​ ​ ​ $ 15.58 ​ ​ ​ ​ ​ $ 25.01 ​ ​ ​ ​ ​ $ 31.99 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2019 PRSU(d) ​ ​ ​ ​ ​ 3/14/2019 ​ ​ ​ ​ ​ $ 14.46 ​ ​ ​ ​ ​ $ 20.36 ​ ​ ​ ​ ​ $ 24.81 ​ ​ ​ ​ ​ $ 56.29 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2020 PRSU(d) ​ ​ ​ ​ ​ 3/17/2020 ​ ​ ​ ​ ​ $ 10.59 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 18.92 ​ ​ ​ ​ ​ $ 43.47 ​ ​ ​ ​ ​ $ 29.82 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2021 PRSU(e) ​ ​ ​ ​ ​ 3/12/2021 ​ ​ ​ ​ ​ $ 27.81 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 40.60 ​ ​ ​ ​ ​ $ 24.76 ​ ​ ​ ​ ​ $ 60.39 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2022 PRSU(e) ​ ​ ​ ​ ​ 3/17/2022 ​ ​ ​ ​ ​ $ 45.28 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 22.27 ​ ​ ​ ​ ​ $ 48.42 ​ ​ ​ ​ ​ $ 29.48 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​
​ ​ 2023 PRSU(e) ​ ​ ​ ​ ​ 3/13/2023 ​ ​ ​ ​ ​ $ 32.25 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 55.03 ​ ​ ​ ​ ​ $ 42.91 ​ ​ ​ ​ ​ $ 47.09 ​ ​ ​
​ ​ 2024 PRSU(e) ​ ​ ​ ​ ​ 3/14/2024 ​ ​ ​ ​ ​ $ 49.38 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 28.20 ​ ​ ​ ​ ​ $ 27.76 ​ ​ ​
​ ​ 2025 PRSU(e) ​ ​ ​ ​ ​ 3/14/2025 ​ ​ ​ ​ ​ $ 31.73 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 46.92 ​ ​ ​
​
(c)
Granted to Dr. Miller only.
​
(d)
Granted to Drs. Miller, Devasahayam, and Porshnev, and Mr. Kiernan.
​
(e)
Granted to Drs. Miller, Devasahayam, and Porshnev, Mr. Kiernan, and Ms. Wilkerson.
                           
Compensation Actually Paid vs. Total Shareholder Return [MISSING IMAGE: lc_ceoneopay-4c.jpg]                            
Compensation Actually Paid vs. Net Income [MISSING IMAGE: lc_relatpaynetin-4c.jpg]                            
Compensation Actually Paid vs. Company Selected Measure [MISSING IMAGE: lc_relatpaynetin-4c.jpg]                            
Total Shareholder Return Vs Peer Group [MISSING IMAGE: lc_ceoneopay-4c.jpg]                            
Tabular List, Table
The Company’s most important performance measures for each of the PEO and non-PEO NEOs is discussed under the 2025 Management Bonus Plan (the “2025 Plan”) subsection of the Compensation Discussion and Analysis section of this proxy. As more fully described in this subsection, the 2025 Plan was based on the financial performance of the Company as measured by Adjusted Operating Income. This financial metric was selected because it closely aligns operating performance with earnings per share, a key driver of shareholder value. Under the 2025 Plan, 25% of each participant’s bonus was based on individual performance which, for each of the PEO and non-PEO NEOs, factored financial goals incorporating revenue, gross margin, bookings and expenses.
                           
Total Shareholder Return Amount | $ $ 164.63 182.5 211.3 126.48 193.81                    
Peer Group Total Shareholder Return Amount | $ 29.4 40.63 38.89 36.09 81.82                    
Net Income (Loss) | $ $ 35,390,000 $ 73,714,000 $ (30,368,000) $ 166,942,000 $ 26,038,000                    
Company Selected Measure Amount 84,267 129,405 122,410 116,577 104,367                    
PEO Name Dr. Miller                            
Share Price $ 28.58 $ 26.8 $ 31.03 $ 18.58 $ 28.47                    
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 10/1/2018                             $ 15.58
Fair Value of Performance-Based Restricted Stock Units, Grant Date 10/1/2018                     $ 31.99   $ 25.01    
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/14/2019                           $ 14.46  
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/14/2019         56.29           24.81   $ 20.36    
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2020                       $ 10.59      
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2020       29.82 43.47           $ 18.92        
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/12/2021                   $ 27.81          
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/12/2021     60.39 24.76 $ 40.6                    
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2022                 $ 45.28            
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2022   29.48 48.42 $ 22.27                      
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/13/2023               $ 32.25              
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/13/2023 47.09 42.91 $ 55.03                        
Grand Date Value Of Performance Based Restricted Stock Units Grant Date 3142024             $ 49.38                
Fair Value Of Performance Based Restricted Stock Units Grant Date 3142024 27.76 $ 28.2                          
Grand Date Value Of Performance Based Restricted Stock Units Grant Date 31420245           $ 31.73                  
FairValueOfPerformanceBasedRestrictedStockUnitsGrantDate3142025 $ 46.92                            
Measure:: 1                              
Pay vs Performance Disclosure                              
Name Adjusted Operating Income                            
PEO | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ $ (3,931,130) $ (5,742,360) $ (3,531,188) $ (4,741,020) $ (3,122,580)                    
PEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ 5,670,140 3,602,300 5,828,750 2,517,420 4,362,540                    
PEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ 382,399 (2,644,666) 5,341,740 (2,779,460) 4,456,145                    
PEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ (1,078,707) 701,833 874,573 (17,073) 2,879,634                    
Non-PEO NEO | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ (786,226) (1,482,345) (699,175) (1,135,870) (813,172)                    
Non-PEO NEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ 1,134,028 910,863 1,154,093 603,132 1,136,078                    
Non-PEO NEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ 72,718 (587,540) 1,348,802 (737,886) 828,795                    
Non-PEO NEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year                              
Pay vs Performance Disclosure                              
Adjustment to Compensation, Amount | $ $ (251,791) $ 185,301 $ 202,063 $ (89,499) $ 89,435                    
v3.26.1
Award Timing Disclosure
 12 Months Ended
Dec. 31, 2025
Award Timing Disclosures [Line Items]  
Award Timing MNPI Disclosure The effective grant date for equity awards to members of our Board is typically the day following our Annual Meeting of Stockholders. For grants to our NEOs, the effective date is the day approved by the Compensation Committee, typically in March of each year. Eligible employees, including our NEOs, may voluntarily enroll in our Employee Stock Purchase Plan (“ESPP”) and receive an option to purchase shares at a discount using payroll deductions accumulated during the prior six-month period. Purchase dates under the ESPP are generally the last trading day in June and December. The Compensation Committee does not grant equity awards in anticipation of the release of material nonpublic information. Similarly, we do not time the release of material nonpublic information based on equity award grant dates.
Award Timing Method The effective grant date for equity awards to members of our Board is typically the day following our Annual Meeting of Stockholders. For grants to our NEOs, the effective date is the day approved by the Compensation Committee, typically in March of each year. Eligible employees, including our NEOs, may voluntarily enroll in our Employee Stock Purchase Plan (“ESPP”) and receive an option to purchase shares at a discount using payroll deductions accumulated during the prior six-month period.
Award Timing Predetermined true
Award Timing MNPI Considered false
Award Timing, How MNPI Considered The effective grant date for equity awards to members of our Board is typically the day following our Annual Meeting of Stockholders. For grants to our NEOs, the effective date is the day approved by the Compensation Committee, typically in March of each year.The Compensation Committee does not grant equity awards in anticipation of the release of material nonpublic information. Similarly, we do not time the release of material nonpublic information based on equity award grant dates.
MNPI Disclosure Timed for Compensation Value false
v3.26.1
Insider Trading Policies and Procedures
 12 Months Ended
Dec. 31, 2025
Insider Trading Policies and Procedures [Line Items]  
Insider Trading Policies and Procedures Adopted true